Whether or not pushing sanitizer out with CO2 results in lower O2 depends on whether you use bottled CO2 or fermentation CO2 to push.
Bottled CO2 is less pure (has higher O2 contamination) than fermentation produced CO2. Bottled CO2 is only guaranteed to have less than 30ppm of O2, but is usually much less (more like 50ppb [0.05ppm].) When purging with bottled CO2, the O2 level cannot be driven lower than the O2 content of the CO2 doing the purging. Therefore, if you purge with bottled CO2, you can’t get lower final O2 than 50ppb, or more.
If you push sanitizer out with fermentation CO2, then you will end up with even lower O2 than if you start with an air filled keg. But since even an air filled keg gets below 5ppb (the analysis was pessimistic, and measured results are even better than predicted) there is no need to worry about it. It won’t hurt anything to fill the keg with sanitizer first, but the improvement will be insignificant.
Brew on